Fortell venner om denne varen:
Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Pris
NOK 2.899
Bestillingsvarer
Forventes levert 3. - 12. des
Julegaver kan byttes frem til 31. januar
Legg til iMusic ønskeliste
eller
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology
Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
356 pages, 2 colour plates, 5 halftones, numerous line figures
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 28. mai 1998 |
| ISBN13 | 9780198562870 |
| Utgivere | Oxford University Press |
| Antall sider | 356 |
| Mål | 163 × 242 × 23 mm · 743 g |
| Språk | Engelsk |