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Interlayer Dielectrics for Semiconductor Technologies Shyam Muraka
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Interlayer Dielectrics for Semiconductor Technologies
Shyam Muraka
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.
464 pages, Approx. 200 illustrations; Illustrations, unspecified
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 30. desember 2003 |
| ISBN13 | 9780125112215 |
| Utgivere | Elsevier Science Publishing Co Inc |
| Antall sider | 464 |
| Mål | 165 × 240 × 25 mm · 1,01 kg |
| Redaktør | Eizenberg, Moshe |
| Redaktør | Murarka, Shyam P |
| Redaktør | Sinha, Ashok K |
