Fortell venner om denne varen:
Rapid Thermal Processing for Future Semiconductor Devices
Fukuda, H. (Muroran Institute of Technology, Department of Electrical and Electronic Engineering, Mizumoto-cho, Muroran, Hokkaido, Japan)
Pris
£ 130,99
Bestillingsvarer
Forventes levert 16. - 26. jul
Legg til iMusic ønskeliste
Rapid Thermal Processing for Future Semiconductor Devices
Fukuda, H. (Muroran Institute of Technology, Department of Electrical and Electronic Engineering, Mizumoto-cho, Muroran, Hokkaido, Japan)
A collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. It covers the following areas such as advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe and hetero-structure.
160 pages
Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
Utgitt | 2. april 2003 |
ISBN13 | 9780444513397 |
Utgivere | Elsevier Science & Technology |
Antall sider | 160 |
Mål | 172 × 243 × 17 mm · 310 g |