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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
| Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
| Utgitt | 16. november 2007 |
| ISBN13 | 9780470727300 |
| Utgivere | John Wiley & Sons Inc |
| Antall sider | 544 |
| Mål | 247 × 174 × 29 mm · 916 g |
| Språk | Engelsk |
Se alt med Mack, Chris (Lithoguru.com) ( f.eks. Pocketbok og Innbunden bok )