Semiconductor Micromachining: Techniques and Industrial Applications - S a Campbell - Bøker - John Wiley & Sons Inc - 9780471966821 - 8. mai 1998
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

S a Campbell

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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.


406 pages, 141 illustrations, 34 graphs, 18 tables

Media Bøker     Innbunden bok   (Bok med hard rygg og stivt omslag)
Utgitt 8. mai 1998
ISBN13 9780471966821
Utgivere John Wiley & Sons Inc
Antall sider 408
Mål 163 × 237 × 29 mm   ·   775 g
Språk Engelsk  
Redaktør Campbell, S. A.
Redaktør Lewerenz, H. J.