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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.
406 pages, 141 illustrations, 34 graphs, 18 tables
Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
Utgitt | 8. mai 1998 |
ISBN13 | 9780471966821 |
Utgivere | John Wiley & Sons Inc |
Antall sider | 408 |
Mål | 163 × 237 × 29 mm · 775 g |
Språk | Engelsk |
Redaktør | Campbell, S. A. |
Redaktør | Lewerenz, H. J. |
Se alt med S a Campbell ( f.eks. Innbunden bok )