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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems Gerhard Lammel 2002 edition
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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems
Gerhard Lammel
Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.
268 pages, biography
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