Handbook of VLSI Microlithography: Principles, Technology and Applications - William B Glendinning - Bøker - William Andrew Publishing - 9780815512813 - 1991
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Handbook of VLSI Microlithography: Principles, Technology and Applications

William B Glendinning

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Handbook of VLSI Microlithography: Principles, Technology and Applications

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.


671 pages

Media Bøker     Innbunden bok   (Bok med hard rygg og stivt omslag)
Utgitt 1991
Opprinelig utgitt 2010
ISBN13 9780815512813
Utgivere William Andrew Publishing
Antall sider 671
Mål 152 × 229 × 36 mm   ·   1,06 kg
Redaktør Glendinning, William B. (Motorola, USA)
Redaktør Helbert, John N. (Motorola, USA)