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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings B J Pawlak
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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
336 pages, black & white illustrations
| Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
| Utgitt | 5. juni 2014 |
| ISBN13 | 9781107408548 |
| Utgivere | Cambridge University Press |
| Antall sider | 336 |
| Mål | 152 × 229 × 18 mm · 533 g (Estimert vekt) |
| Språk | Engelsk |
| Redaktør | Law, M. (University of Florida) |
| Redaktør | Pawlak, B. J. |
| Redaktør | Pelaz, M. L. (Universidad de Valladolid, Spain) |
| Redaktør | Surugo, K. |
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