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Optical Inspection of Microsystems, Second Edition
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
600 pages, 32 Illustrations, color; 525 Illustrations, black and white
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 25. juni 2019 |
| ISBN13 | 9781498779470 |
| Utgivere | Taylor & Francis Inc |
| Antall sider | 570 |
| Mål | 262 × 188 × 30 mm · 1,38 kg |
| Språk | Engelsk |
| Redaktør | Osten, Wolfgang (Universitat Stuttgart, Germany) |
