Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology - Seongbo Shim - Bøker - Springer Nature Switzerland AG - 9783030094553 - 8. februar 2019
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Softcover Reprint of the Original 1st 2018 edition

Seongbo Shim

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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Softcover Reprint of the Original 1st 2018 edition

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.


138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.

Media Bøker     Pocketbok   (Bok med mykt omslag og limt rygg)
Utgitt 8. februar 2019
ISBN13 9783030094553
Utgivere Springer Nature Switzerland AG
Antall sider 138
Mål 226 g
Språk Tysk