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![Cover for Christopher Lyle Borst · Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology (Pocketbok) [Softcover reprint of the original 1st ed. 2002 edition] (2014)](https://imusic.b-cdn.net/images/item/original/246/9781461354246.jpg?christopher-lyle-borst-2014-chemical-mechanical-polishing-of-low-dielectric-constant-polymers-and-organosilicate-glasses-fundamental-mechanisms-and-application-to-ic-interconnect-technology-pocketbok&class=scaled&v=1520118127)