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Lecture Notes on Principles of Plasma Processing Francis F. Chen 2003 edition
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Lecture Notes on Principles of Plasma Processing
Francis F. Chen
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.
219 pages, 177 black & white illustrations, biography
| Media | Bøker Bok |
| Utgitt | 31. januar 2003 |
| ISBN13 | 9780306474972 |
| Utgivere | Springer Science+Business Media |
| Antall sider | 219 |
| Mål | 213 × 278 × 12 mm · 517 g |
| Språk | Engelsk |
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