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Optical Inspection of Microsystems
This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.
503 pages, 375 equations; 230 Halftones, black and white; 23 Tables, black and white; 479 Illustrati
| Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
| Utgitt | 17. oktober 2019 |
| ISBN13 | 9780367390570 |
| Utgivere | Taylor & Francis Ltd |
| Antall sider | 532 |
| Mål | 150 × 220 × 10 mm · 453 g |
| Språk | Engelsk |
| Serieredaktør | Thompson, Brian J. (University of Rochester, New York, USA) |
