Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices - Nato Science Series E:

Marc Notes: Includes bibliographical references and index.; Published in cooperation with NATO Scientific Affairs Division.; Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad Windsheim, Germany, September 21-October 2, 1992--T.p. verso. Table of Contents: Plasma Sputter Deposition Systems: Plasma Generation, Basic Physics and Characterization.- Technology and Application of Filamentless RF Ion Sources in Ion Beam Sputter Deposition.- Physics of Film Growth from the Vapor Phase.- Techniques for the Growth of Crystalline Films by Molecular Beam Deposition.- Discharge Density Increase for High Rate Magnetron Sputtering.- On the Transport of Sputtered Species in Plasma Sputter-Deposition Systems.- Influence of Sputter Gas Pressure and Substrate Bias on Intrinsic Stress and Crystallinity of Coatings Produced by Magnetron Sputtering.- Sputter Deposition of Multicomponent Targets: What Parts of the Process Affect the Elemental Composition of the Film.- A Proposition of a Novel Reactive Sputter-Deposition System for Synthesizing Multi-Component Materials.- The Influence of Precursors on the Preparation of Thin Pyrite Films by Metal Organic Chemical Vapor Deposition.- Modelling of the Intrinsic Stress in PVD-Coatings.- Physical Vapor Deposition of Multicomponent Oxide Thin Films: Techniques, Basic Deposition Processes and Film Processing-Microstructure-Property Relationships.- Pulsed Laser Deposited Metal-Oxide Based Superconductor, Semiconductor and Dielectric Heterostructures and Superlattices.- Synthesis of Optical Thin Films: Fundamentals and Applications.- Ion Beam-Based Characterization of Multicomponent Oxide Thin Films and Thin Film Layered Structures.- Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides.- Transmission Electron Microscopy of Oxide Thin Films.- Laser Deposition of HTSC Films: Expansion of the Laser Plasma, Deposition of Particles, Formation of the Crystal Structure and Superconducting Properties of Films.- YBACUO Films by Pulsed Laser Deposition and Sputtering.- Transverse Electrooptic Properties of Magnetron Sputtered PLZT Thin Films.- Lead Zirconate Titanate Ferroelectric Thin Films by Laser Ablation Deposition.- Photo Voltaic Properties of Reactive Thermal Evaporated Indium Oxide (IO)/ Silicon Junctions.- In Situ Compositional Analysis of Multielement Thin Films.- Si-Ge Strained Layer Heterostructures: Device Possibilities and Process Limitations.- Growth, Properties and Applications of Epitaxial Selicides.- Deposition Fundamentals and Properties of Metallic and Diffusion Barrier Films.- Epitaxial CoSi2 Formation on (001) Si using Sequentially Deposited Ti-Co Bilayers.- Stress in Si1-xGex Films Prepared by Ion Beam Sputtering.- Band Engineering of High Bandgap Semiconductors by Superlattices.- Characterization of Tungsten Films and Hard Tungsten-Carbon Coatings Prepared by DC Magnetron Sputtering Process.- Pulsed Excimer Laser Induced Reactions at the Tungsten-Silicon Interface.- Rapid Pulsed CO2 Laser Annealing of Silicon-Nitride / Silicon Interface States.- Interface Properties of Anodic Sulfide and Sulfide-Oxide Films on n-InSb.- Spin Glass Like Behavior in Cr-Cu Multilayers.- High Temperature Superconducting Thin Film-Based Devices.- Ferroelectric Thin Films and Device Applications.- Phase Locking in Series-Connected Nb-Al-Nb Planar Josephson Weak Links."Publisher Marketing: The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films. The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.

Contributor Bio:  North Atlantic Treaty Organization Dedication. Preface. Acknowledgments. Clifford Geometric Algebras in Multilinear Algebra and Non-Euclidean Geometries.- Geometric algebra Projective Geometries; Affine and other geometries; Affine Geometry of pseudo-euclidean space; Conformal Geometry and the Horosphere; References. Content-Based Information Retrieval by Group Theoretical Methods.- Introduction; Motivating Examples; General Concept; Fault Tolerance.- Applications, Prototypes, and Test Results; Related Work and Future Research; References.- Four Problems in Radar.-Introduction; Radar Fundamentals; Radar Waveforms; Signal Processing; Space-Time Adaptive Processing; Four Problems in Radar; Conclusions. Introduction to Generalized Classical and Quantum Signal and System Theories on Groups and Hypergroups.-Generalized classical signal/system theory on hypergroups; Generalized quantum signal/system theory on hypergroups; Conclusion; References. Lie Groups and Lie Algebras in Robotics.- Introduction -- Rigid Body Motions; Lie Groups; Finite Screw Motions; Mechanical Joints; Invisible Motion and Gripping; Forward Kinematics; Lie Algebra; The Adjoint Representation; The Exponential Map Derivatives of Exponentials; Jacobians; Concluding Remarks; References. Quantum/Classical Interface: a Geometric Approach from the Classical Side.- Introduction Paravector Space as Spacetime; Eigenspinors; Spin; Dirac Equation; Bell's Theorem; Qubits and Entanglement; Conclusions; References. PONS, Reed-Muller Codes, and Group Algebras.- Introduction; Analytic Theory of One-Dimensional PONS (Welti); Shapiro Sequences, Reed-Muller Codes, and Functional Equations; Group Algebras; Reformulation of Classical PONS; Group Algebra of Classical PONS; GroupAlgebra Convolution; Splitting Sequences; Historical Appendix on PONS; References. Clifford Algebras as a Unified Language.- Introduction; Clifford algebras as models of physical spaces; Clifford Algebras as Models of Perceptual Multicolor Spaces; Hypercomplex-Valued invariants of nD multicolor images; Conclusions; Acknowledgments; References. Recent Progress and Applications in Group FFTs.-Introduction; Finite group FFTs; FFTs for compact groups; Noncompact groups; References. Group Filters and Image Processing.- Introduction: Classical Digital Signal Processing; Abelian Group DSP; Nonabelian Groups; Examples; Group Transforms; Group Filters; Line-like Images; Acknowledgments; References. A Geometric Algebra Approach to Some Problems of Robot Vision.- Introduction; Local Analysis of Multi-dimensional Signals; Knowledge Based Neural Computing; Acknowledgments; References. Group Theory in Radar and Signal Processing.- Introduction; How a Radar Works; Representations; Representations and Radar; Ambiguity Functions; The Wide Band Case; References. Geometry of Paravector Space with Applications to Relativistic Physics.- Clifford Algebras in Physics; Paravector Space as Spacetime; Interpretation; Eigenspinors; Maxwell's Equation; Conclusions; References. A Unified Approach to Fourier-Clifford-Prometheus Transforms- Introduction; New construction of classical and multiparametric Prometheus transforms; PONS associated with Abelian groups; Fast Fourier-Prometheus Transforms; Conclusions; Acknowledgments; References. Fast Color Wavelet Transforms.- Introduction; Color images; Color Wavelet-Haar-Prometheus transforms; Edge detection and compression of color images; Conclusion; Acknowledgments; References. Selected Problems; Various Authors.- Transformations of Euclidean Space and Clifford Geometric; Algebra; References; On the Distribution of Kloosterman Sums on Polynomials over Quaternions; References; Harmonic Sliding Analysis Problems; References; Spectral Analysis under Conditions of Uncertainty; A Canonical Basis for Maximal Tori of the Reductive Centrizer of a Nilpotent Element; References; 6 The Quantum Chaos Conjecture References; Four Problems in Radar; Topic Index; Author IndexContributor Bio:  Auciello, Orlando ORLANDO AUCIELLO, PhD, is a Senior Scientist at the Argonne National Laboratory. ALAN R. KRAUSS, PhD, (deceased) was a Senior Scientist at the Argonne National Laboratory.