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An Introduction to Microelectromechanical Systems Engineering
Nadim Maluf
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 30. november 1999 |
| ISBN13 | 9780890065815 |
| Utgivere | Artech House Print on Demand |
| Antall sider | 265 |
| Mål | 158 × 24 × 232 mm · 644 g |
| Språk | Engelsk |
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