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Computational Modeling in Semiconductor M. Meyyappan
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Computational Modeling in Semiconductor
M. Meyyappan
Provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition and plasma processing, as well as defining the basic principles of transport phenomena.
390 pages, 120 illustrations
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 1995 |
| Opprinelig utgitt | 1994 |
| ISBN13 | 9780890067079 |
| Utgivere | Artech House |
| Antall sider | 390 |
| Mål | 159 × 229 × 25 mm · 657 g |
| Redaktør | Meyyappan, M. |
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