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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems Michael Huff 2020 edition
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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems
Michael Huff
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 10. april 2020 |
| ISBN13 | 9783030405588 |
| Utgivere | Springer Nature Switzerland AG |
| Antall sider | 521 |
| Mål | 150 × 220 × 20 mm · 934 g |
| Språk | Tysk |
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