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Design for Manufacturability with Advanced Lithography Bei Yu Softcover reprint of the original 1st ed. 2016 edition
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 35 Tables, black and white; XI, 164 p.
| Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
| Utgitt | 23. august 2016 |
| ISBN13 | 9783319373935 |
| Utgivere | Springer International Publishing AG |
| Antall sider | 164 |
| Mål | 150 × 220 × 10 mm · 258 g |
| Språk | Tysk |
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