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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology 2018 edition
Seongbo Shim
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology
Seongbo Shim
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 3. april 2018 |
| ISBN13 | 9783319762937 |
| Utgivere | Springer International Publishing AG |
| Antall sider | 138 |
| Mål | 150 × 220 × 20 mm · 394 g |
| Språk | Tysk |
Se alt med Seongbo Shim ( f.eks. Pocketbok og Innbunden bok )