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Practical Guide to RF-MEMS Jacopo Iannacci
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Practical Guide to RF-MEMS
Jacopo Iannacci
Providing researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radiofrequency applications.
372 pages, colour illustrations, black & white tables, figures