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Modelling of Microfabrication Systems - Microtechnology and MEMS Raja Nassar 2003 edition
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Modelling of Microfabrication Systems - Microtechnology and MEMS
Raja Nassar
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
270 pages, biography
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 13. juni 2003 |
| ISBN13 | 9783540002529 |
| Utgivere | Springer-Verlag Berlin and Heidelberg Gm |
| Antall sider | 270 |
| Mål | 155 × 235 × 17 mm · 562 g |
| Språk | Tysk |
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