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Low Pressure Plasmas and Microstructuring Technology Gerhard Franz 2009 edition
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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, 1, black & white illustrations
| Media | Bøker Innbunden bok (Bok med hard rygg og stivt omslag) |
| Utgitt | 30. april 2009 |
| ISBN13 | 9783540858485 |
| Utgivere | Springer-Verlag Berlin and Heidelberg Gm |
| Antall sider | 732 |
| Mål | 155 × 235 × 39 mm · 1,23 kg |
| Språk | Engelsk |
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