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Low Pressure Plasmas and Microstructuring Technology Softcover reprint of hardcover 1st ed. 2009 edition
Gerhard Franz
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Low Pressure Plasmas and Microstructuring Technology Softcover reprint of hardcover 1st ed. 2009 edition
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, black & white illustrations
Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
Utgitt | 19. oktober 2010 |
ISBN13 | 9783642099397 |
Utgivere | Springer-Verlag Berlin and Heidelberg Gm |
Antall sider | 732 |
Mål | 155 × 235 × 38 mm · 1,04 kg |
Språk | Engelsk |