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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS Stephanus Buttgenbach 2011 edition
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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS
Stephanus Buttgenbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
444 pages, biography
| Media | Bøker Pocketbok (Bok med mykt omslag og limt rygg) |
| Utgitt | 21. mars 2014 |
| Opprinelig utgitt | 2013 |
| ISBN13 | 9783642267383 |
| Utgivere | Springer-Verlag Berlin and Heidelberg Gm |
| Antall sider | 444 |
| Mål | 155 × 235 × 24 mm · 635 g |
| Språk | Tysk |
| Redaktør | Burisch, Arne |
| Redaktør | Buttgenbach, Stephanus |
| Redaktør | Hesselbach, Jurgen |
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